The Harrick Expanded Plasma Cleaner with PlasmaFlo Gas Flow Mixer is used for nanoscale surface cleaning and surface activation using plasma. It allows for the use of atmospheric air, N2, O2, or a mixture at near-ambient temperature, minimizing the risk of thermal damage.
Location: Cleanroom, Wet Bay II
Trainings: 3 sessions (2 Trainings and a Checkout Session)
- Maximum of 30 W
- Adjustable RF power (low, medium, and high)
- 6" diameter x 6.5" length Pyrex chamber
- Maximum flowrate of 50mL/min (for atmospheric air at 0 psig)
One time Reservation Cost: $20
Per Hour Cost: Free
Cleanroom Usage: $34/hr for internal and non-profit, $50/hr for external users
The user manual can be found here.