Instrument List and Pricing
NCF Instruments
Descriptions of these instruments, Location, Required Trainings and the pricing for self unassisted use of these instruments can be explored by clicking any of the instrument in the table. For any additional information please contact the NCF staff.
Please note, the manuals are for reference only and sometimes may not depict actual working due to hardware or software updates. Please contact NCF staff if there are any questions or concerns.
Please note, Investigators from the Northwestern University and the University of Chicago are provided internal rates as all UIC users. All other users can access services but, at either external academic or external non-academic rate.
Lithography Instruments
| Instrument Name | Manufacturer | Model | Instrument Usage Fee (I = Internal, E = External) | Manual | Cleanroom Usage Fee? |
|---|---|---|---|---|---|
| Lithography Instruments | |||||
| Heidelberg MLA150 | Heidelberg | MLA 150 | $30/hr (I), $48/hr (E) | – | Yes |
| Heidelberg DWL66fs | Heidelberg | DWL66fs | $15/hr (I), $24/hr (E) | Manual | Yes |
| Karl Suss MA6 Mask Aligner | Karl Suss | MA6 | $10/hr (I), $16/hr (E) | Manual | Yes |
| Nanoscribe 3D Lithography System | Nanoscribe | – | $20/hr (I), $32/hr (E) | Manual | Yes |
| Raith Electron Beam Lithography | Raith | eLine | $50/hr (I), $80/hr (E) | Manual | No |
| Etching Instruments | |||||
| Oxford Deep Reactive Ion Etch (DRIE) System | Oxford | Plasmalab System 100 | $50/hr (I), $80/hr (E) | Manual | Yes |
| Trion Minilock Phantom III RIE/RIE-ICP System | Trion | Phantom III | $25/hr (I), $40/hr (E) | Manual | Yes |
| KOH Temperature Bath | – | – | – | – | |
| Harrick Barrel Plasma Etcher | Harrick | – | $10/hr (I), $16/hr (E) | Manual | Yes |
| Characterization Instruments | |||||
| Bruker-Nano Discover 8 X-Ray Diffraction System | Bruker-Nano | Discover 8 | $25/hr (I), $40/hr (E) | Manual | No |
| Bruker-Nano Atomic Force Microscope | Bruker-Nano | Dimension Icon | $20/hr (I), $32/hr (E) | Manual | Yes |
| Bruker-Nano Contour GT-K Optical Profilometer | Bruker-Nano | Contour GT-K | $10/hr (I), $16/hr (E) | Manual | Yes |
| Dataphysics DCAT-25 Tensiometer | Dataphysics | DCAT-25 | $20/hr (I), $32/hr (E) | Manual | No |
| Gaertner Ellipsometer | Gaertner | – | $10/hr (I), $16/hr (E) | Manual | Yes |
| I-V measurement system | Keithley | 2400 SMU | $20/hr (I), $32/hr (E) | – | No |
| KLA-Tencor P7 Stylus Contact Profilometer | KLA-Tencor | P7 | $10/hr (I), $16/hr (E) | Manual | Yes |
| Malvern Dynamic Laser Scattering System | Malvern | Zetasizer Nano | $20/hr (I), $32/hr (E) | Manual | No |
| TA Instruments DSC System | TA Instruments | Q2000 | $25/hr (I), $40/hr (E) | – | No |
| TA Instruments TGA System | TA Instruments | Q5000 | $25/hr (I), $40/hr (E) | Manual | No |
| Deposition Instruments | |||||
| Bruce Oxidation/Diffusion Furnace | Bruce | – | $20/hr (I), $32/hr (E) | Manual | Yes |
| CVC SC-4000 Sputtering | CVC | SC-4000 | $15/hr (I), $24/hr (E) | Manual | Yes |
| Parylene C Deposition System | Specialty Coating Systems | PDS 2010 | $20/hr (I), $32/hr (E) | – | No |
| Parylene N Deposition System | Specialty Coating Systems | PDS 2010 | $20/hr (I), $32/hr (E) | – | No |
| PTL LPCVD System | PTL | – | $40/hr (I), $64/hr (E) | Manual | Yes |
| Technics SEM Sputter Coater | Technics | Hummer V | $20/hr (I), $32/hr (E) | Manual | No |
| Trion Minilock Orion III PECVD System | Trion | Orion III | $25/hr (I), $40/hr (E) | – | Yes |
| Varian Electron Beam Evaporator | Varian | – | $20/hr (I), $32/hr (E) | Manual | Yes |
| Packaging Instruments | |||||
| Blue M Programmable Oven | Blue M | IGF-668OE-MP | $20/hr (I), $32/hr (E) | – | No |
| Disco Automatic Dicing Saw | Disco | DAD 321 | $48/hr (I), $76.8/hr (E) | Manual | No |
| Microautomation Model 1006 Dicing Saw | Microautomation | TV1006 | $48/hr (I), $76.8/hr (E) | Manual | No |
| Rapid Thermal Processor | Photonami | – | $50/hr (I), $80/hr (E) | Manual | No |
| Sonoscan Gen-6 C-mode Scanning Acoustic Microscope | Sonoscan | Gen-6 | $20/hr (I), $32/hr (E) | Manual | No |
| Tykma Laser Marker System | TYKMA Electrox | EMS 300 | $20/hr (I), $32/hr (E) | Manual | No |
| Westbond Wedge-Wedge Gold Wire Bonder | Westbond | 7476E | $25/hr (I), $40/hr (E) | Manual | No |
Electrical Measurement Instruments
| Manufacturer | Model | Instrument Name |
|---|---|---|
| Hewlett Packard | 4284A | HP Precision LCR Meter |
| Hewlett Packard | 4140B | HP pA Meter/DC Voltage Source |
| Keithley | 2450 | Keithley Source Meter |
| MMR Technologies | K-20 | Programmable Temperature Controller |
| MMR Technologies | H-50 | Hall. Van Der Paw Controller |
| Stanford Research Systems | SR830 | DSP Lock-in Amplifier |
| Veeco | FPP-100 | Four Point Probe |
NCF Services
The NCF provides a variety of services for Facility Users, who are unable to perform these functions themselves for a number of reasons including time/distance constraints, the facilities and equipment are unavailable in their personal laboratories and they or their personnel are untrained in clean room semiconductor manufacturing-type processes and equipment.
These Users are typically academic faculty, postdocs and students performing research as well as industrial researchers requiring special equipment unavailable to them in their manufacturing facilities, which are often dedicated to manufacturing product, rather than conducting product research and development.
The NCF is particularly useful to new or recently established start-up companies, who do not have the facilities, equipment and/or processes necessary to create prototype devices in order to prove the R&D concepts are sound and that the device can be manufactured easily to top investor groups.
Some of these services include:
- Training on all clean room protocols, equipment and film processes. Processes can range from optical or electron beam photolithography to metal or insulator electron beam, sputtering, and plasma-enhanced chemical vapor deposition to reactive ion etching.
- Creation of thin film structures and devices either by assisting users during the process steps or actually being done solely by NCF staff.
- Consultation with NCF staff with years of experience in semiconductor device manufacturing techniques on possible means to accomplish a variety of R&D goals, using the equipment and processes available to all in the NCF clean room.
- Providing operating space for temporary equipment installation or storage of wafers, glassware, and chemicals used in their processes.
I encourage all possible future users to contact Dr. Seyoung An (syan11@uic.edu) to discuss their needs and see how the NCF can best meet those requirements.