The KLA-Tencor P-7 Stylus Contact Profiler is a surface measurement system that is capable of wide range of surface measurements such as thin and thick film step height measurements, surface roughness and waviness, curvature, 2D stress of thin films, and many more. The system offers easy point-and-click operations and Apex software can be used for filtering, leveling, and surface analysis, and easy creation customized reports.
Location: cleanroom, characterization bay
Training: 3 sessions (2 trainings and a checkout session)
- 150 mm scan stage
- Up to 1 mm Z range
- Standard 2 um radius stylus, with options ranging from sub-micron to 25 um
- Constant force control 0.03 – 50 mg
- Sampling rate 5 – 2000 Hz
One time Reservation Cost: $20 per reservation
Per Hour Cost: Free
Cleanroom Usage: $34/hr for internal and non-profit, $50/hr for external users
The user manual can be found here.