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The KLA-Tencor P-7 Stylus Contact Profiler is a surface measurement system that is capable of wide range of surface measurements such as thin and thick film step height measurements, surface roughness and waviness, curvature, 2D stress of thin films, and many more. The system offers easy point-and-click operations and Apex software can be used for filtering, leveling, and surface analysis, and easy creation customized reports.

Location: cleanroom, characterization bay

Training: 3 sessions (2 trainings and a checkout session)

Technical Specifications:

  • 150 mm scan stage
  • Up to 1 mm Z range
  • Standard 2 um radius stylus, with options ranging from sub-micron to 25 um
  • Constant force control 0.03 – 50 mg
  • Sampling rate 5 – 2000 Hz


One time Reservation Cost: $5 per reservation

Per Hour Cost:

$10 Internal User
$16 External User

Cleanroom Usage: $34/hr for internal and non-profit, $50/hr for external users

User Manual:

The user manual can be found here.