NCF’s Trion Mini-lock Orion III PECVD system comes with a vacuum load-lock that allows for isolation of the reaction chamber from atmosphere to reduce the impact of exposure to atmosphere between runs. The reaction chamber is pumped by a turbo pump and a 300-Watt (350-460 kHz) bottom-powered electrode. After passing the NCF safety exam, users can request training on this machine by sending an email to ncftech@uic.edu. Those not trained can request an NCF work service order by contacting the lab manager.
NCF’s Trion Mini-lock Orion III PECVD system comes with a vacuum load-lock that allows for isolation of the reaction chamber from atmosphere to reduce the impact of exposure to atmosphere between runs. The reaction chamber is pumped by a turbo pump and a 300-Watt (350-460 kHz) bottom-powered electrode. After passing the NCF safety exam, users can request training on this machine by sending an email to ncftech@uic.edu. Those not trained can request an NCF work service order by contacting the lab manager.
Location: Cleanroom, Deposition bay
Training: 3-5 Sessions (Minimum-2 trainings and a checkout session)
Technical Specifications:
- Wafer Sizes: 2, 3, and 4-inch
- Min Reaction Chamber Pressure:
- Min Load-lock Pressure:
- Gases: N2, NH3, N2O, 4% SH4, CF4-O2, Sl4
- Max Deposition Temp: 400 C
Pricing:
One time Reservation Cost: $20
Per Hour Cost: Internal user and External (Academic) user: $5/hr ; External (Industrial or Foreign) : $10/hr
Cleanroom Usage: $34/hr for internal and non-profit, $50/hr for external users