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NCF’s Trion Mini-lock Orion III PECVD system comes with a vacuum load-lock that allows for isolation of the reaction chamber from atmosphere to reduce the impact of exposure to atmosphere between runs. The reaction chamber is pumped by a turbo pump and a 300-Watt (350-460 kHz) bottom-powered electrode. After passing the NCF safety exam, users can request training on this machine by sending an email to ncftech@uic.edu. Those not trained can request an NCF work service order by contacting the lab manager.

NCF’s Trion Mini-lock Orion III PECVD system comes with a vacuum load-lock that allows for isolation of the reaction chamber from atmosphere to reduce the impact of exposure to atmosphere between runs. The reaction chamber is pumped by a turbo pump and a 300-Watt (350-460 kHz) bottom-powered electrode. After passing the NCF safety exam, users can request training on this machine by sending an email to ncftech@uic.edu. Those not trained can request an NCF work service order by contacting the lab manager.

Location: Cleanroom, Deposition bay

Training: 3-5 Sessions (Minimum-2 trainings and a checkout session)

Technical Specifications:

  • Wafer Sizes: 2, 3, and 4-inch
  • Min Reaction Chamber Pressure:
  • Min Load-lock Pressure:
  • Gases: N2, NH3, N2O, 4% SH4, CF4-O2, Sl4
  • Max Deposition Temp: 400 C

Pricing:

One time Reservation Cost: $20

Per Hour Cost: Internal user and External (Academic) user: $5/hr ; External (Industrial or Foreign) : $10/hr

Cleanroom Usage: $34/hr for internal and non-profit, $50/hr for external users