Your browser is unsupported

We recommend using the latest version of IE11, Edge, Chrome, Firefox or Safari.

The Technics Hummer Model V Sputter Coater is available for use in the plating, etching, or plasma processing of samples. Currently, NCF has Au, Pt and Al targets with an Argon 5-9's purity gas ambient. The default target installed in Au, so any user requiring another target should please contact the NCF main office in advance of their use. After passing the NCF safety exam, users can request training on this machine by sending an email to Those not trained can request an NCF work service order by contacting the lab manager.

Location: Electron-Beam Lithography room

Training: 2 sessions (1 training and a checkout session)

Technical Specifications:

  • Max sample size: 3-inch
  • Materials available: Au, Al
  • Gas: Ar (five 9’s purity)
  • Min pressure: < 30 mTorr


One time Reservation Cost: $5

Per Hour Cost:

$10 Internal User
$16 External User

User Manual:

The user manual can be found here.