The Technics Hummer Model V Sputter Coater is available for use in the plating, etching, or plasma processing of samples. Currently, NCF has Au, Pt and Al targets with an Argon 5-9's purity gas ambient. The default target installed in Au, so any user requiring another target should please contact the NCF main office in advance of their use. After passing the NCF safety exam, users can request training on this machine by sending an email to ncftech@uic.edu. Those not trained can request an NCF work service order by contacting the lab manager.
Location: Electron-Beam Lithography room
Training: 2 sessions (1 training and a checkout session)
Technical Specifications:
- Max sample size: 3-inch
- Materials available: Au, Al
- Gas: Ar (five 9’s purity)
- Min pressure: < 30 mTorr
Pricing:
One time Reservation Cost: $5
Per Hour Cost:
$10 Internal User
$16 External User
User Manual:
The user manual can be found here.